JPH0380242B2 - - Google Patents

Info

Publication number
JPH0380242B2
JPH0380242B2 JP59017971A JP1797184A JPH0380242B2 JP H0380242 B2 JPH0380242 B2 JP H0380242B2 JP 59017971 A JP59017971 A JP 59017971A JP 1797184 A JP1797184 A JP 1797184A JP H0380242 B2 JPH0380242 B2 JP H0380242B2
Authority
JP
Japan
Prior art keywords
light beam
rotating mirror
optical axis
polygonal rotating
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59017971A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60162905A (ja
Inventor
Taizo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP1797184A priority Critical patent/JPS60162905A/ja
Publication of JPS60162905A publication Critical patent/JPS60162905A/ja
Publication of JPH0380242B2 publication Critical patent/JPH0380242B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1797184A 1984-02-03 1984-02-03 光学式測定装置 Granted JPS60162905A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1797184A JPS60162905A (ja) 1984-02-03 1984-02-03 光学式測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1797184A JPS60162905A (ja) 1984-02-03 1984-02-03 光学式測定装置

Publications (2)

Publication Number Publication Date
JPS60162905A JPS60162905A (ja) 1985-08-24
JPH0380242B2 true JPH0380242B2 (en]) 1991-12-24

Family

ID=11958613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1797184A Granted JPS60162905A (ja) 1984-02-03 1984-02-03 光学式測定装置

Country Status (1)

Country Link
JP (1) JPS60162905A (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821711A (ja) * 1981-07-31 1983-02-08 Fujitsu Ltd 光学装置

Also Published As

Publication number Publication date
JPS60162905A (ja) 1985-08-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees